• Book cover of: Advanced MEMS/NEMS Fabrication and Sensors. By: Zhuoqing Yang

Advanced MEMS/NEMS Fabrication and Sensors

Zhuoqing Yang

€157,62
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Autorius Zhuoqing Yang
Leidimo metai 2021 m.
Puslapių skč. 312 psl.
Viršelis Kietas viršelis
ISBN 9783030797485
Leidimas 2022 ed.

Advanced MEMS/NEMS Fabrication and Sensors

This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications.

Book cover of: Advanced MEMS/NEMS Fabrication and Sensors. By: Zhuoqing Yang

Advanced MEMS/NEMS Fabrication and Se...

€157,62
€157,62 €162,49